Title
Large-area 2D periodic crystalline silicon nanodome arrays on nanoimprinted glass exhibiting photonic band structure effects
Date Issued
06 April 2012
Access level
metadata only access
Resource Type
journal article
Author(s)
Becker C.
Lockau D.
Sontheimer T.
Schubert-Bischoff P.
Rudigier-Voigt E.
Bockmeyer M.
Schmidt F.
Helmholtz-Zentrum Berlin für Materialien und Energie
Abstract
Two-dimensional silicon nanodome arrays are prepared on large areas up to 50cm 2 exhibiting photonic band structure effects in the near-infrared and visible wavelength region by downscaling a recently developed fabrication method based on nanoimprint-patterned glass, high-rate electron-beam evaporation of silicon, self-organized solid phase crystallization and wet-chemical etching. The silicon nanodomes, arranged in square lattice geometry with 300nm lattice constant, are optically characterized by angular resolved reflection measurements, allowing the partial determination of the photonic band structure. This experimentally determined band structure agrees well with the outcome of three-dimensional optical finite-element simulations. A 16% photonic bandgap is predicted for an optimized geometry of the silicon nanodome arrays. By variation of the duration of the selective etching step, the geometry as well as the optical properties of the periodic silicon nanodome arrays can be controlled systematically. © 2012 IOP Publishing Ltd.
Volume
23
Issue
13
Language
English
OCDE Knowledge area
IngenierÃa del Petróleo, (combustibles, aceites), EnergÃa, Combustibles
IngenierÃa de materiales
Scopus EID
2-s2.0-84858393827
Source
Nanotechnology
ISSN of the container
09574484
Sponsor(s)
Seventh Framework Programme - 240826 - FP7
Sources of information:
Directorio de Producción CientÃfica
Scopus