Title
Dislocation generation at the coalescence of aluminum nitride lateral epitaxy on shallow-grooved sapphire substrates
Date Issued
11 June 2007
Access level
metadata only access
Resource Type
journal article
Author(s)
Abstract
The joining of defect-free AlN stripes is observed to trigger the generation of a large density of threading dislocations in the vicinity of the coalescence point. The AlN structure was grown by pulsed lateral epitaxy on shallow-grooved sapphire substrates. In the precoalescence stage, the dislocation density in the lateral epitaxial region (< 108 cm-2) is over two orders of magnitude less than in standard c -plane epitaxy. Basal-plane dislocations (b=a= 1 3 <11 2- 0>) are generated at the coalescence point as a result of relaxation of compressive stress that develops due to temperature gradients during growth. They bend toward the surface during the postcoalescence growth stage, leading to a high density of pure-edge threading dislocations in the lateral growth regions. Some threading dislocations form loops on prismatic planes in the crystal and the basal segments are observed to glide in the [0001] direction under the electron beam in the microscope. © 2007 American Institute of Physics.
Volume
90
Issue
22
Language
English
OCDE Knowledge area
Física de partículas, Campos de la Física
Scopus EID
2-s2.0-34249867130
Source
Applied Physics Letters
ISSN of the container
00036951
Sponsor(s)
The authors gratefully acknowledge the support under DARPA Grant No. DAAD19-02-1-0282 monitored by H. Temkin (DARPA) and J. Zavada (ARO). The work at ASU was supported by a grant from Nichia Corporation. The use of the facilities within the John M. Cowley Center for High Resolution Electron Microscopy at Arizona State University is gratefully acknowledged.
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