Title
Dislocation generation at the coalescence of aluminum nitride lateral epitaxy on shallow-grooved sapphire substrates
Date Issued
11 June 2007
Access level
metadata only access
Resource Type
journal article
Author(s)
Mei J.
Fareed R.
Yang J.
Khan M.
Abstract
The joining of defect-free AlN stripes is observed to trigger the generation of a large density of threading dislocations in the vicinity of the coalescence point. The AlN structure was grown by pulsed lateral epitaxy on shallow-grooved sapphire substrates. In the precoalescence stage, the dislocation density in the lateral epitaxial region (< 108 cm-2) is over two orders of magnitude less than in standard c -plane epitaxy. Basal-plane dislocations (b=a= 1 3 <11 2- 0>) are generated at the coalescence point as a result of relaxation of compressive stress that develops due to temperature gradients during growth. They bend toward the surface during the postcoalescence growth stage, leading to a high density of pure-edge threading dislocations in the lateral growth regions. Some threading dislocations form loops on prismatic planes in the crystal and the basal segments are observed to glide in the [0001] direction under the electron beam in the microscope. © 2007 American Institute of Physics.
Volume
90
Issue
22
Language
English
OCDE Knowledge area
Física de partículas, Campos de la Física
Scopus EID
2-s2.0-34249867130
Source
Applied Physics Letters
ISSN of the container
00036951
Sponsor(s)
The authors gratefully acknowledge the support under DARPA Grant No. DAAD19-02-1-0282 monitored by H. Temkin (DARPA) and J. Zavada (ARO). The work at ASU was supported by a grant from Nichia Corporation. The use of the facilities within the John M. Cowley Center for High Resolution Electron Microscopy at Arizona State University is gratefully acknowledged.
Sources of information: Directorio de Producción Científica Scopus