Title
2D visual micro-position measurement based on intertwined twin-scale patterns
Date Issued
01 September 2016
Access level
open access
Resource Type
journal article
Author(s)
Publisher(s)
Elsevier B.V.
Abstract
Position measurement at nanoscale currently raises issues such as making significant compromise between range and resolution or as the difficulty to measure several directions with a single sensor. This paper presents a novel visual method to measure displacements at nanometric scale along two axes. This method allows subpixelic measurement of position by using a pseudo-periodic pattern observed by a regular visual setup. This micrometric pattern corresponds to the intertwining of two perpendicular copies of a single-axis pattern made of two frequency carriers with slightly different periods. It was realized in clean room by photolythography of aluminium on glass. The algorithm is based on a twin-scale principle, itself based on direct phase measurement of periodic grids. Experiments are performed at video rate (30 fps) and show a linearity below 0.16% and a repeatability below 14 nm over an unambiguous range of 221 μm. A resolution below 0.5 nm is demonstrated by the use of 2000 images. The method can be adjusted to different ranges, according to the needs.
Start page
272
End page
280
Volume
248
Language
English
OCDE Knowledge area
Ingeniería mecánica
Subjects
Scopus EID
2-s2.0-84989944732
Source
Sensors and Actuators, A: Physical
ISSN of the container
09244247
Sponsor(s)
This work was supported by Labex ACTION project (ANR-11-LABX-01-01) and by Région de Bourgogne-Franche-Comté . Authors acknowledge the French RENATECH network through its FEMTO-ST technological facilities MIMENTO, ROBOTEX (ANR-10-EQPX-44-01) and ENSMM for its metrological room. M. Asmad Vergara was supported by Student Grant Huiracocha Program-PUCP (Peru).
Sources of information:
Directorio de Producción Científica
Scopus