Title
Aluminum oxide free-standing thin films to enable nitrogen edge soft X-ray scattering
Date Issued
01 March 2019
Access level
open access
Resource Type
journal article
Author(s)
Ye D.
Rongpipi S.
Litofsky J.H.
Lee Y.
Culp T.E.
Yoo S.H.
Jackson T.N.
Wang C.
Gomez E.W.
Pennsylvania State University
Publisher(s)
Cambridge University Press
Abstract
Resonant soft X-ray scattering (RSoXS) leverages chemical specificity to characterize thin films but is limited near the nitrogen edge. The challenge is that commercially available X-ray transparent substrates are composed of Si 3 N 4 and thereby absorb incident X-rays and generate incoherent fluorescence. To overcome this challenge, we designed and fabricated Al 2 O 3 free-standing films for use as RSoXS windows. Al 2 O 3 films offer higher X-ray transmittance and minimal fluorescence near the nitrogen edge. As an example, Al 2 O 3 windows allow for nitrogen RSoXS of conjugated block copolymer thin films that reveal domain spacings, which are not apparent with commercially available Si 3 N 4 substrates.
Start page
224
End page
228
Volume
9
Issue
1
Language
English
OCDE Knowledge area
Nano-tecnología
Ingeniería de materiales
Scopus EID
2-s2.0-85053689111
Source
MRS Communications
ISSN of the container
2159-6859
Sponsor(s)
Financial support from NSF MRI-1626566 (E.D.G.) and the Grace Woodward Grant for Collaborative Research in Engineering and Medicine (E.W.G.) is acknowledged. D.Y. acknowledges support by an Advanced Light Source Doctoral Fellowship in Residence. The Advanced Light Source is supported by the Director, Office of Science, Office of Basic Energy Sciences, of the US Department of Energy under Contract No. DE-AC02-05CH11231.
Sources of information:
Directorio de Producción Científica
Scopus