Title
Simulation, fabrication and characterization of a tunable bragg reflector based on silicon oxide and silicon nitride dielectric films deposited by PECVD
Date Issued
01 December 2007
Access level
metadata only access
Resource Type
conference paper
Author(s)
Universidad de São Paulo
Abstract
In this work we present the simulation, fabrication and characterization of a Tunable Bragg Reflector based on dielectric silicon oxide and silicon nitride films deposited over corning-glass substrates by Plasma Enhanced Chemical Vapor Deposition at low temperatures (320 °C). The device consists of consecutive layers of silicon oxide and silicon nitride films with appropriated refractive indices and thickness to function as an interferential filter in the visible region. The optical results of these devices are comparable to the numerical simulations previously realized, showing an attenuation peak in the transmittance curve at approximately 680 nm. Also, when an angular variation between the incident light beam and the optical filter is produced, a shift in the attenuation peak is observed, which is due to a difference in the optical path of the incident beam. This behavior agrees with simulated results. When a change in temperature is applied to the optical device, a shift in the attenuation peak is also observed, which is related to the thermo-optic effect (TOE) of this kind of material. These results demonstrate that it is possible to control the optical output power of the device through the adequate control of the angle of the incident beam and/or temperature of the device. © The Electrochemical Society.
Start page
497
End page
504
Volume
9
Issue
1
Language
English
OCDE Knowledge area
Recubrimiento, Películas
Ingeniería eléctrica, Ingeniería electrónica
Scopus EID
2-s2.0-45249096261
ISSN of the container
19386737
ISBN of the container
978-156677565-6
Conference
ECS Transactions - 22nd Symposium on Microelectronics Technology and Devices, SBMicro2007
Sources of information:
Directorio de Producción Científica
Scopus