Title
Study of boron incorporation during PVT growth of p-type SiC crystals
Date Issued
01 January 2001
Access level
metadata only access
Resource Type
journal article
Author(s)
Bickermann M.
Hofmann D.
Rasp M.
Straubinger T.L.
Wellmann P.J.
Winnacker A.
University of Erlangen-Nürnberg
Publisher(s)
Trans Tech Publ
Abstract
The incorporation of the acceptor boron during vapor growth (PVT) of 6H-SiC bulk crystals has been studied. The chemical segregation coefficient of boron (ratio between B content of the grown crystal and of the source) has been determined to be 0.4±0.1 for a wide range of B concentrations in the starting material (0.3-300 ppm wt). For reference purposes the impurity concentrations in nominally undoped SiC crystals have been analyzed. Whereas both source and SiC crystals exhibit a high purity in regard to p-type (Al, B) and deep level (V, Ti) impurities, a considerable amount of residual nitrogen was detected resulting in carrier concentrations n = 1×1016 to 1.5×1017 cm-3. Carrier concentrations in the p-type B doped crystals were found to range from 2×1014 to 2×1016 cm-3 for starting B concentrations between 3 to 300 ppm wt. Axial non-uniformities, i.e. carrier concentration in SiC:B increases with crystal length, depend on the compensation ratio. At higher B content the homogeneity improves. Compared with segregation in Al doped SiC, results indicate that SiC:B powder acts as infinite, SiC:Al powder as finite dopant source. The lateral distribution of carrier concentration in SiC:B crystals (wafer mapping) has been measured showing a good homogeneity of electrical properties.
Start page
49
End page
52
Volume
353-356
Language
English
OCDE Knowledge area
Ingeniería de materiales
Scopus EID
2-s2.0-4243366495
Source
Materials Science Forum
ISSN of the container
02555476
Conference
3rd European Conference on Silicon Carbide and Related Materials
Sources of information: Directorio de Producción Científica Scopus