Title
Study of boron incorporation during PVT growth of p-type SiC crystals
Date Issued
01 January 2001
Access level
metadata only access
Resource Type
journal article
Author(s)
University of Erlangen-Nürnberg
Publisher(s)
Trans Tech Publ
Abstract
The incorporation of the acceptor boron during vapor growth (PVT) of 6H-SiC bulk crystals has been studied. The chemical segregation coefficient of boron (ratio between B content of the grown crystal and of the source) has been determined to be 0.4±0.1 for a wide range of B concentrations in the starting material (0.3-300 ppm wt). For reference purposes the impurity concentrations in nominally undoped SiC crystals have been analyzed. Whereas both source and SiC crystals exhibit a high purity in regard to p-type (Al, B) and deep level (V, Ti) impurities, a considerable amount of residual nitrogen was detected resulting in carrier concentrations n = 1×1016 to 1.5×1017 cm-3. Carrier concentrations in the p-type B doped crystals were found to range from 2×1014 to 2×1016 cm-3 for starting B concentrations between 3 to 300 ppm wt. Axial non-uniformities, i.e. carrier concentration in SiC:B increases with crystal length, depend on the compensation ratio. At higher B content the homogeneity improves. Compared with segregation in Al doped SiC, results indicate that SiC:B powder acts as infinite, SiC:Al powder as finite dopant source. The lateral distribution of carrier concentration in SiC:B crystals (wafer mapping) has been measured showing a good homogeneity of electrical properties.
Start page
49
End page
52
Volume
353-356
Language
English
OCDE Knowledge area
Ingeniería de materiales
Scopus EID
2-s2.0-4243366495
Source
Materials Science Forum
ISSN of the container
02555476
Conference
3rd European Conference on Silicon Carbide and Related Materials
Sources of information:
Directorio de Producción Científica
Scopus