Title
A comparison of Rutherford backscattering spectroscopy and X-ray diffraction to determine the composition of thick InGaN epilayers
Date Issued
01 November 2001
Access level
metadata only access
Resource Type
journal article
Author(s)
Srinivasan S.
Liu R.
Bertram F.
Tanaka S.
Omiya H.
Nakagawa Y.
Abstract
In this paper, we report the measurements of indium composition of thick InGaN epilayers by X-ray diffraction (XRD) and Rutherford backscattering spectroscopy (RBS). In order to account for the biaxial stress in the InGaN epilayers, we determined both a and c lattice parameters in a θ/2θ scan. Indium composition was determined by simultaneous application of Vegard's law to both lattice parameters and by considering the relationship between the lattice parameters under strain. These composition values are compared with values determined by RBS. The value of elastic constants used in these calculations is critical and we show that by careful choice we can obtain a good correlation between the XRD and RBS measurements.
Start page
41
End page
44
Volume
228
Issue
1
Language
English
OCDE Knowledge area
Física atómica, molecular y química
Scopus EID
2-s2.0-0035541046
Source
Physica Status Solidi (B) Basic Research
ISSN of the container
03701972
Sources of information: Directorio de Producción Científica Scopus