Title
Effect of nitrogen dilution in the optical properties of amorphous SiC thin films
Date Issued
01 January 2015
Access level
metadata only access
Resource Type
conference paper
Publisher(s)
Trans Tech Publications Ltd
Abstract
The effect of the nitrogen dilution on the optical and vibrational properties of amorphous silicon carbide (a-SiC) and silicon oxycarbide (a-SiCO) layers have been studied. The films were prepared by radio frequency (rf) reactive magnetron sputtering using an atmosphere mixture of argon (Ar) and nitrogen (N2). The oxygen (O2) was incorporated according to the base pressure used of each deposition process. The optical and vibrational properties of the films were characterized by means of UV/VIS transmittance measurements and Fourier transform infrared spectroscopy (FTIR), respectively. A relationship between the variation of the optical bandgap and the increase or quench of vibrational modes is established. This analysis reveals that the increase of nitrogen in both host matrices a-SiC and a-SiCO induced the formation of C=N and C≡N bonds thus reducing the bandgap of the material.
Start page
217
End page
220
Volume
821-823
Language
English
OCDE Knowledge area
Óptica
Scopus EID
2-s2.0-84950316336
Source
Materials Science Forum
Resource of which it is part
Materials Science Forum
ISSN of the container
02555476
ISBN of the container
978-303835478-9
Conference
European Conference on Silicon Carbide and Related Materials, ECSCRM 2014
Sources of information: Directorio de Producción Científica Scopus