Title
Surface phonon polariton: The 4<sup>th</sup>heat carrier in SiN nanofilms
Date Issued
01 June 2021
Access level
metadata only access
Resource Type
conference paper
Author(s)
University of Tokyo
Publisher(s)
Institute of Electrical and Electronics Engineers Inc.
Abstract
Heat dissipation is one of the most important issue in modern highly integrated electronic devices. Thermal conduction in semiconductors becomes less efficient as structures scale down to nanoscale due to the predominant phonon-boundary scattering. Besides the classical heat dissipation channels of conduction, convection, and radiation, recent studies have indicated that surface phonon-polaritons (SPhPs), which are evanescent electromagnetic waves generated by the hybridization of optical phonons and photons, open a new heat transport channel in nanofilms [ Fig. 1(a) ] [1] - [4]. These waves propagate along the surface of polar dielectric materials and could be powerful heat carriers capable of enhancing the thermal performance of micro- and nanoscale devices. In this work, we experimentally observe the energy contribution of SPhPs by systematic measurements of the in-plane thermal conductivity of SiN nanofilms with different thicknesses and temperatures ranging from 300 to 800 K.
Language
English
OCDE Knowledge area
Nano-procesos
Nano-materiales
Scopus EID
2-s2.0-85117607939
ISBN
9781665418768
Conference
2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2021
Sources of information:
Directorio de Producción Científica
Scopus