Metal oxide nanotubes (NTs) semiconductors prepared by anodization are promising materials due to their expected unique optical and electric properties. However, most of the work reported to date did not find photoelectrochemical devices with higher efficiency than those assembled with nanoparticles. Moreover, this behavior is due to the difficulty of having non-defective crystalline structures and the disruption of the tubular shape during thermal treatment while trying to reduce oxygen vacancies. This work describes in detail the local atomic configuration, surface area and morphology properties of Ta2O5 NTs prepared by anodization as a function of the temperature and the crystallization time by using X-ray diffraction (XRD) and X-ray absorption spectroscopy (XAS). The crystallization process of adhered and freestanding Ta2O5 NTs is discussed. Adhered NTs crystallized at 550 °C due to the oxidation of the Ta metal during annealing in the air atmosphere and not the NT array itself. Freestanding Ta2O5 NTs crystallized after annealing at 800 °C. Rietveld refinements were performed to investigate the effects of the temperature and the annealing time on the grain size and microstrain and obtain information about Ta-O interatomic distances. The local structure of amorphous and crystalline Ta2O5 NTs was investigated with EXAFS. Low coordination numbers were found in the as-anodized samples as well as the samples annealed for 30 min at 800 °C. The coordination number increased when annealing was performed above 800 °C or when the annealing time was longer than 30 min. Moreover, the decrease of defects was followed by an increase in the crystal size and collapse of the tubular shape due to the increase in internal stress generated by the increase in the crystallinity of the tubes and the orthorhombic Ta2O5 crystal size. © 2014 The Royal Society of Chemistry.