Title
High quality a-plane GaN films grown on cone-shaped patterned r-plane sapphire substrates
Date Issued
01 February 2011
Access level
metadata only access
Resource Type
journal article
Author(s)
Sun Y.Q.
Wu Z.H.
Yin J.
Fang Y.Y.
Wang H.
Yu C.H.
Hui X.
Chen C.Q.
Wei Q.Y.
Li T.
Sun K.W.
Abstract
Planar nonpolar (112̄0) a-plane GaN films have been grown by metalorganic chemical-vapor deposition directly on cone-shaped patterned r-plane sapphire substrates (PRSS) fabricated by dry etching. High-resolution X-ray diffractometers 2θ-ω scan confirmed that the films grown on PRSS are solely a-plane oriented, and the full width at half maximum values (FWHM) of the X-ray rocking curves for (112̄0) GaN along [0001]GaN and [11̄00]GaN were found to be 684 and 828″, respectively. As compared to the film grown on conventional r-plane sapphire substrate which typically has (112̄0) omega FWHM values of 900 and 2124″ along [0001]GaN and [11̄00]GaN respectively, the film grown on PRSS exhibits overall reduced omega FWHM values, and much smaller anisotropy behavior of crystallinity with respect to the in-plane orientation. The surface morphology is also improved by utilizing the PRSS technique. Cross-sectional transmission electron microscopy analysis shows that the density of threading dislocations has been greatly reduced from ~ 1.0 × 1010 cm - 2 above the flat sapphire regions to ~ 1.0 × 107 cm- 2 above the protruding cone patterns. The improvement of crystal quality and the increase of light extraction efficiency by using cone-shaped PRSS technique lead to a strong enhancement in the light emission of a-plane GaN films. These results indicate that growth of a-plane GaN films on cone-shaped PRSS shows promise for use in high-quality and high-cost-performance nonpolar GaN based devices. © 2010 Elsevier B.V.All rights reserved.
Start page
2508
End page
2512
Volume
519
Issue
8
Language
English
OCDE Knowledge area
Química física
Subjects
Scopus EID
2-s2.0-79551502920
Source
Thin Solid Films
ISSN of the container
00406090
Sponsor(s)
This work was supported by the National Natural Science Foundation of China (Grant No. 60906023 and Grant No. 60976042 ), the National Basic Research Program of China (973 Program: 2010CB923204 ), the Program for New Century Excellent Talents in University (NCET- 08-0214 ), the Research Fund for the Doctoral Program of Higher Education of China (Grant No. 20090142120084 ), the Hubei Province Science Fund for Distinguished Young Scholars (Grant No. 2008CDB334 ), and the Key Programs of the Natural Science Foundation of Huazhong University of Science and Technology (Grant No. 20072008B ).
Sources of information:
Directorio de Producción Científica
Scopus