Title
CBED study of grain misorientations in AlGaN epilayers
Date Issued
01 April 2005
Access level
metadata only access
Resource Type
conference paper
Author(s)
Abstract
Large angle convergent beam electron diffraction (LACBED) has been used to examine AlGaN epilayers grown by facet-controlled epitaxial lateral overgrowth on GaN/(0 0 0 1) sapphire substrates in prototype UV laser structures. The substrates, defined by masks with seed openings along a 〈10-10〉 stripe direction, had GaN seed columns with {11-22} surfaces. Studies were carried out on cross-sectional samples cut perpendicular to the stripe axis. An LACBED analysis of the orientation of (0 0 0 2) planes, and of the (11-20) planes parallel to the stripe axis, revealed that the AlGaN wings were both rotated by angles of 1-2×10-2 radians about the 〈10-10〉 stripe axis with respect to the underlying GaN, and distorted due to misfit strains. It is shown that the results are consistent with the observed structure of the AlGaN/GaN and the wing/wing boundaries, and with a new model for the generation of a-type misfit dislocations at the AlGaN/GaN interface. © 2004 Elsevier B.V. All rights reserved.
Start page
23
End page
32
Volume
103
Issue
1
Language
English
OCDE Knowledge area
Física atómica, molecular y química
Subjects
Scopus EID
2-s2.0-14944351030
Source
Ultramicroscopy
ISSN of the container
03043991
Sponsor(s)
The authors are grateful for financial assistance from an NEDO Grant 01MB10.
Sources of information:
Directorio de Producción Científica
Scopus