Title
A review of the synthesis of reduced defect density In<inf>x</inf>Ga<inf>1−x</inf>N for all indium compositions
Date Issued
01 October 2017
Access level
open access
Resource Type
journal article
Author(s)
Clinton E.A.
Vadiee E.
Fabien C.A.M.
Moseley M.W.
Gunning B.P.
Doolittle W.A.
Fischer A.M.
Wei Y.O.
Xie H.
Publisher(s)
Elsevier Ltd
Abstract
A review of metal rich and nitrogen rich (N-rich), low-temperature grown InxGa1−xN is provided, focusing on two low-temperature approaches that have resulted in non-phase separated InxGa1−xN. The metal modulated epitaxy (MME) and N-rich, low temperature approaches to the reduction of defects in InxGa1−xN are described and are capable of growing InxGa1−xN throughout the miscibility gap. MME films remain smooth at all thicknesses but show device quality material primarily for x < 0.2 and x > 0.6. Low temperature, N-rich grown films show a critical thickness extend well beyond the theoretical values and results in slower relaxation through the 0.2 < x < 0.6 range most interesting for light emitters and solar cells. This reduced defect density results in improved optical emission, but due to increased roughening with increased thickness, low temperature, N-rich films are limited to thin layers. Future thick InxGa1−xN substrates are necessary to increase design freedom, as well as improve optoelectronic device performance. Initial results with films up to 800 nm are shown to display evidence of defect annihilation which could be promising for future thick optoelectronic templates and thick devices.
Start page
3
End page
11
Volume
136
Language
English
OCDE Knowledge area
Física atómica, molecular y química
Scopus EID
2-s2.0-85022053878
Source
Solid-State Electronics
ISSN of the container
00381101
Sponsor(s)
National Science Foundation, 1710032, NSF.
Sources of information:
Directorio de Producción Científica
Scopus