Title
THERMALLY INDUCED MICRO-DEFECTS IN CZ SILICON: A HIGH RESOLUTION ELECTRON MICROSCOPY STUDY.
Date Issued
01 December 1983
Access level
metadata only access
Resource Type
conference paper
Author(s)
Publisher(s)
Inst of Physics
Start page
65
End page
70
Issue
67
Language
English
OCDE Knowledge area
Física atómica, molecular y química
Scopus EID
2-s2.0-0020892620
ISSN of the container
03730751
ISBN of the container
0854981586
Conference
Institute of Physics Conference Series
Sources of information:
Directorio de Producción Científica
Scopus