Title
PECVD intermediate and absorber layers applied in liquid-phase crystallized silicon solar cells on glass substrates
Date Issued
01 November 2014
Access level
metadata only access
Resource Type
journal article
Author(s)
Gabriel O.
Frijnts T.
Calnan S.
Ring S.
Kirner S.
Opitz A.
Rothert I.
Rhein H.
Zelt M.
Bhatti K.
Zollondz J.
Heidelberg A.
Haschke J.
Amkreutz D.
Gall S.
Friedrich F.
Stannowski B.
Schlatmann R.
Institute for Silicon Photovoltaics
Publisher(s)
IEEE Electron Devices Society
Abstract
Liquid-phase crystallized silicon absorber layers have been applied in heterojunction solar cells on glass substrates with 10.8% conversion efficiency and an open-circuit voltage of 600 mV. Intermediate layers of SiOx, SiNx , and SiOxNy, as well as the a-Si:H precursor layer, were deposited on 30 cm × 30 cm glass substrates using industrial-type plasma-enhanced chemical vapor deposition equipment. After crystallization on 3 cm × 5 cm area using a continuous-wave infrared laser line, the resulting polysilicon material showed high material quality with large grain sizes.
Start page
1343
End page
1348
Volume
4
Issue
6
Language
English
OCDE Knowledge area
Ingeniería de materiales
Subjects
Scopus EID
2-s2.0-84908227024
PubMed ID
Source
IEEE Journal of Photovoltaics
ISSN of the container
21563381
Sources of information:
Directorio de Producción Científica
Scopus