Title
Uniform axial charge carrier concentration in PVT-grown p-type 6H SiC by non-uniform distribution of boron in the powder source
Date Issued
01 January 2004
Access level
metadata only access
Resource Type
conference paper
Author(s)
University of Erlangen-Nümberg
Publisher(s)
Trans Tech Publications Ltd
Abstract
We have investigated the influence of boron distribution within the powder source during PVT growth of p-type 6H-SiC on the axial homogeneity of the charge carrier concentration. It is shown that a rather homogeneous hole concentration in the grown crystals can be achieved if the boron doped portion of the powder is located at the upper crucible part due to the compensation with nitrogen. In this case a simultaneous decrease of NA and ND concentration is observed during growth. Homogeneity with respect to the optical absorption in the visible was also achieved.
Start page
719
End page
722
Volume
457-460
Issue
I
Language
English
OCDE Knowledge area
Ingeniería de materiales
Subjects
Scopus EID
2-s2.0-8744292935
Source
Materials Science Forum
ISSN of the container
02555476
Conference
Proceedings of the 10th International Conference on Silicon Carbide and Related Materials, ICSCRM 2003
Sources of information:
Directorio de Producción Científica
Scopus