Title
Study of the pedestal process for reducing sidewall scattering in photonic waveguides
Date Issued
01 May 2017
Access level
open access
Resource Type
journal article
Author(s)
Universidad de São Paulo
Publisher(s)
OSA - The Optical Society
Abstract
In this work we investigate the principles of an alternative method for defining sidewall in optical waveguides fabricated using planar technology. The efficiency of this method is demonstrated through simulations and experimental results regarding propagation losses of a solid core ARROW waveguide fabricated on silicon substrate. It is well known that waveguides fabricated using sidewalls etched via Reactive Ion Etching (RIE) can present high sidewall roughness, especially if metallic hard-masks are used. This is largely responsible for the undesirable losses observed in these waveguides. The basic strategy of the proposed method is to do the etching step, in the fabrication of the waveguides, before the deposition of the core, so as to have the lower cladding layer and part of the silicon substrate etched away. Only after this, is the core of the waveguide deposited. This results in a waveguide sustained by a silicon pedestal. With this process, losses as low as 0.45 dB cm-1 for multimode and 0.84 dB cm-1 for single mode waveguides are obtained. The numerical simulations demonstrate that roughness in sidewalls implicates in propagation losses which are at least five times larger that those in the bulk of the material, thus corroborating the idea behind the proposed method.
Start page
9755
End page
9760
Volume
25
Issue
9
Language
English
OCDE Knowledge area
Ingeniería de materiales
Óptica
Scopus EID
2-s2.0-85018356939
PubMed ID
Source
Optics Express
ISSN of the container
10944087
Sponsor(s)
Fundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP) (2007/0860-9, 2007/00775-1) and Conselho Nac. de Des. Cient. e Tecnol. (CNPq) (477214/2007-0, 307349/2014-4).
Sources of information:
Directorio de Producción Científica
Scopus