We succeeded in preparing a-Si:H/μc-Si:H solar cells on 30×30 cm 2 substrate size using high rate 13.56 MHz PECVD processes. Stable cell efficiencies up to 11.2% were achieved on textured ZnO as front TCO. First solar modules were realised by applying an industrially established technology for patterning and back contact preparation. These modules showed initial aperture area efficiencies (689 cm 2) up to 9.7 % using SnO 2 coated glass substrates. In parallel, a new process technology for the development of a-Si:H/μc-Si:H solar modules on glass started operation at the Institute of Photovoltaics. On 30×30 cm 2 substrate size initial aperture area module efficiencies of 10.1 % were demonstrated by using texture-etched ZnO:Al coated glass substrates.