Title
Integration of a micro-incandescent lamp and an interferometric filter for optical applications
Date Issued
27 April 2011
Access level
metadata only access
Resource Type
conference paper
Author(s)
Báez H.
Universidad de São Paulo
Abstract
In this work we propose an integration of two kinds of optical devices: an incandescent micro lamp and an interferometric filter, both fabricated on silicon technology. The micro lamp is based on a chromium micro resistor, working as a lamp filament, embedded between two oxynitride films and self-sustained through the partial silicon substrate etching using KOH solutions. The interferometric filters were fabricated through the deposition of periodically alternated PECVD Si3N4 and SiO2 films whose thicknesses were previously defined by numerical simulations. We present the fabrication of these two devices separately and its integration in a hybrid way. The results demonstrated that light filtering can be obtained on micro-lamps light emission spectrums when integrated with interferometric filters, at the wavelength intervals defined by filter transmittance spectrums. Electrical characterization allowed determining the necessary current to obtain constant and stable light emission from micro lamps. The possibility of integration in a unique process, in a quasi-monolithic integration, is proposed. © 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).
Volume
7940
OCDE Knowledge area
Ingeniería de materiales
Óptica
Subjects
Scopus EID
2-s2.0-79955062634
ISSN of the container
0277786X
ISBN of the container
978-081948477-2
Conference
Proceedings of SPIE - The International Society for Optical Engineering
Sources of information:
Directorio de Producción Científica
Scopus