Title
Lateral and vertical growth of Mg-doped GaN on trench-patterned GaN films
Date Issued
08 September 2020
Access level
open access
Resource Type
journal article
Author(s)
Publisher(s)
American Institute of Physics Inc.
Abstract
Growth of Mg-doped GaN on trench-patterned GaN films consists of competing lateral and vertical growth fronts that result in regions with different electronic properties. Under typical growth conditions, lateral growth from the trench sidewall occurs at a faster rate than vertical growth from the trench base. When the trench width is sufficiently narrow, the growth fronts from opposite sidewalls coalesce and lead to eventual planarization of the top surface. Secondary electron imaging and cathodoluminescence mapping are used to correlate the morphology and the optical properties of regions resulting from lateral and vertical growth. For our growth conditions, the lateral-to-vertical growth rate ratio is found to be about 2.
Volume
117
Issue
10
Language
English
OCDE Knowledge area
Física de partículas, Campos de la Física
Scopus EID
2-s2.0-85091518989
Source
Applied Physics Letters
ISSN of the container
00036951
Sponsor(s)
This work was supported by the ARPA-E PNDIODES Program monitored by Dr. Isik Kizilyalli. We acknowledge the use of facilities within the Eyring Materials Center at Arizona State University. The device fabrication was performed at the Center for Solid State Electronics Research at Arizona State University. Access to the NanoFab was supported, in part, by NSF Contract No. ECCS-1542160.
Sources of information:
Directorio de Producción Científica
Scopus