Light trapping techniques are one of the key research areas in thin film silicon photovoltaics. Since the 1980s randomly rough textured front transparent oxides (TCOs) have been the methods of choice as light trapping strategies for thin-film devices. Light-trapping efficiency can be optimized by means of optical simulations of nano-structured solar cells. We present a FEM based simulator for 3D rigorous optical modeling of amorphous silicon/microcrystalline silicon tandem thin-film solar cells with randomly textured layer interfaces. We focus strongly on an error analysis study for the presented simulator to demonstrate the numerical convergence of the method and investigate grid and finite element degree refinement strategies in order to obtain reliable simulation results. © 2013 Copyright SPIE.