Indium-doped zinc oxide thin films were prepared by spray pyrolytic decomposition of zinc acetate with indium acetate in an alcoholic solution. The films were deposited onto soda lime glass substrate, alumina, and sodium chloride crystal. X-Ray energy dispersive spectroscopy (EDS) and rutherford backscattering spectroscopy (RBS) were used to determine film composition. More detailed information about the crystallographic structure of the films was obtained with the application of Rietveld refinement method to analyze X-ray diffraction spectra. From the position and shape of the X-ray line profiles lattice parameters, domain size and micro strains were determined. Small In amounts (<3 at.%) cause decreasing lattice parameters, then, with further In insertion an increase of these parameters is observed. Preferential growth orientation was dependent on the In contents. The inverse pole figure (IPF), in the direction normal to the surface, was obtained semi-quantitatively; only (002) planes have a marked tendency to grow parallel to the substrate, consequently, for optimal dopant concentration the films are strongly c-axis oriented. The film microstructure was observed by electron microscopy techniques: surface morphology and microstructure were correlated with the results of the X-ray diffraction analysis.