Title
Optical characterization of high mobility polycrystalline ZnO:Al films
Date Issued
23 March 2012
Access level
metadata only access
Resource Type
conference paper
Author(s)
Ruske F.
Wimmer M.
Köppel G.
Pflug A.
Helmholtz-Zentrum Berlin für Materialien und Energie
Abstract
Optical methods are powerful and non-destructive means to characterize highly doped transparent conducting oxide thin films. In order to describe the optical properties of high-mobility ZnO films we present a dielectric function composed of different analytic expressions to describe the different contributions to the dielectric function of the films. This allows for the correct description of measured optical spectra and reduces the complex functions to a set of fitting parameters. In a second step we compare the obtained parameters to theoretical models. The basic theories are nicely reproduced and the basic link between optical and electrical properties can be understood. The findings can help on the route to a complete presiction of optical properties from the basic material properties or vice versa. © 2012 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).
Volume
8263
Language
English
OCDE Knowledge area
Recubrimiento, Películas
Scopus EID
2-s2.0-84858597060
ISSN of the container
0277786X
ISBN of the container
9780819489067
Conference
Proceedings of SPIE - The International Society for Optical Engineering
Sources of information: Directorio de Producción Científica Scopus