Title
Optically pumped deep-ultraviolet AlGaN multi-quantum-well lasers grown by metalorganic chemical vapor deposition
Date Issued
01 January 2014
Access level
metadata only access
Resource Type
conference paper
Author(s)
Liu Y.S.
Kao T.T.
Satter M.M.
Lochner Z.
Li X.H.
Shen S.C.
Yoder P.D.
Detchprohm T.
Dupuis R.D.
Wei Y.
Xie H.
Fischer A.
Publisher(s)
SPIE
Abstract
A 245.3 nm deep ultraviolet optically pumped AlGaN based multiple-quantum-well laser operating at room temperature is described. Epitaxial growth was performed by metalorganic chemical vapor deposition on a c-plane bulk AlN substrate at a growth temperature of ∼ 1130 °C. The wafer was fabricated into cleaved bars with a cavity length of ∼1.45 mm and the lasing threshold was determined to be 297 kW/cm2 under pulsed 193 nm ArF excimer laser excitation. A further ∼20% reduction in threshold pumping power density was observed with six pairs of SiO2/HfO 2 distributed Bragg reflector deposited at the rear side of facets.
Volume
9002
Language
English
OCDE Knowledge area
Química física
Subjects
Scopus EID
2-s2.0-84901796400
ISSN of the container
0277786X
ISBN of the container
978-081949915-8
Conference
Proceedings of SPIE - The International Society for Optical Engineering
Sponsor(s)
Defense Advanced Research Projects Agency, FA2386-10-1-4152.
Sources of information:
Directorio de Producción Científica
Scopus