Title
Melting and solidification behavior of laser-crystallized silicon thin-films studied by transient conductance measurements
Date Issued
01 September 2012
Access level
metadata only access
Resource Type
conference paper
Author(s)
Helmholtz-Zentrum Berlin für Materialien und Energie
Abstract
In this paper we report on transient conductance measurements during melting and solidification of thin silicon films on foreign substrates, which were irradiated with an excimer laser. The silicon films were deposited on borosilicate float glass or single crystal silicon wafers that were coated with different intermediate layers. Our results show that the laser fluence required to melt the entire Si layer is mainly determined by the silicon-substrate interfacial thermal resistance and not by the heat conductivity of the bulk substrate. The solidification velocity, on the other hand, is strongly influenced by the heat conductivity of the bulk substrate and reaches a maximum value of 0.95 m/s for c-Si compared to 2.19 m/s for borosilicate float glass. © 2012 Elsevier B.V. All rights reserved.
Start page
2159
End page
2161
Volume
358
Issue
17
Language
English
OCDE Knowledge area
Recubrimiento, Películas
Ingeniería del Petróleo, (combustibles, aceites), Energía, Combustibles
Subjects
Scopus EID
2-s2.0-84865711599
Source
Journal of Non-Crystalline Solids
ISSN of the container
00223093
Sources of information:
Directorio de Producción Científica
Scopus