Title
STRUCTURE OF THERMALLY-INDUCED MICRODEFECTS IN CZ SILICON.
Date Issued
01 December 1983
Access level
metadata only access
Resource Type
conference paper
Author(s)
Publisher(s)
Electrochemical Soc Inc
Start page
105
End page
114
Volume
September 83
Language
English
OCDE Knowledge area
Química física
Scopus EID
2-s2.0-0020940790
Conference
Proceedings - The Electrochemical Society
Sources of information:
Directorio de Producción Científica
Scopus