Title
Temperature Dependence and High-Temperature Stability of the Annealed Ni/Au Ohmic Contact to p-Type GaN in Air
Date Issued
01 April 2016
Access level
metadata only access
Resource Type
journal article
Author(s)
Zhao S.
McFavilen H.
Wang S.
Arena C.
Goodnick S.
Chowdhury S.
Publisher(s)
Springer New York LLC
Abstract
We report on the temperature-dependent contact resistivity and high-temperature stability of the annealed Ni/Au ohmic contacts to p-type GaN in air. As the measure temperature increases from 25°C to 390°C, both the specific contact resistivity (ρc) and sheet resistance (Rsh) decrease by factors ∼10, contributing to the 10-fold increase in current at 390°C compared with that at 25°C. It was also observed that the ρc was further reduced by 36%, i.e., from 2.2 × 10−3 Ω cm2 to 1.4 × 10−3 Ω cm2, during the 48-h high-temperature stability test at 450°C in air, showing excellent stability of the contacts. An increase in ρc was observed after the contacts were subjected to 500°C in air. Higher temperature stress led to a significant increase in ρc. The contacts show rectifying I–V characteristics after being subjected to 700°C for 1 h. The degradation mechanics were analyzed with the assistance of transmission electron microscopy and energy dispersive x-ray spectroscopy.
Start page
2087
End page
2091
Volume
45
Issue
4
Language
English
OCDE Knowledge area
Física de partículas, Campos de la Física
Subjects
Scopus EID
2-s2.0-84961134395
Source
Journal of Electronic Materials
ISSN of the container
03615235
Sponsor(s)
The work presented herein was funded in part by the Advanced Research Projects Agency-Energy (ARPA-E), U.S. Department of Energy, under award number DE-AR0000470.
Sources of information:
Directorio de Producción Científica
Scopus