Title
Titanium dioxide thin films: Refractive index variation as a function of the deposition rate
Date Issued
01 December 2004
Access level
metadata only access
Resource Type
conference paper
Abstract
The present work studies the variation of refractive index of titanium dioxide thin films due to changes in the evaporation rate during the deposition process under high vacuum. The experiments were done by depositing thin films on a glass disk of 45 cm in diameter for different deposition rates. To characterize thin films the spectral transmittance in the visible range was measured at different points along of two perpendicular radii. The refractive index profile was then determined from these data by using an inverse synthesis method. The results permitted us to obtain the refractive index variation as a function of evaporation geometry for different deposition rates.
Start page
560
End page
563
Volume
5622
Issue
PART 2
Language
English
OCDE Knowledge area
Física y Astronomía
Óptica
Subjects
Scopus EID
2-s2.0-17644367469
Source
Proceedings of SPIE - The International Society for Optical Engineering
ISSN of the container
0277786X
Conference
RIAO/OPTILAS 2004: 5th Iberoamerican Meeting on Optics, and 8th Latin American Meeting on Optics, Lasers, and their Applications; ICO Regional Meeting
Sources of information:
Directorio de Producción Científica
Scopus