Title
Excimer-laser-induced crystallization of hydrogenated amorphous silicon
Date Issued
01 December 1990
Access level
metadata only access
Resource Type
journal article
Author(s)
Winer K.
Anderson G.
Ready S.
Bachrach R.
Johnson R.
Boyce J.
Abstract
The electronic transport properties and structural morphology of fast-pulse excimer-laser- crystallized hydrogenated amorphous silicon (a-Si:H) thin films have been measured. The room-temperature dark dc conductivities and Hall mobilities increase by several orders of magnitude at well-defined laser energy density thresholds which decrease as the impurity concentration in the films increases. The structural morphology of the films suggests an impurity-induced reduction of the a-Si:H melt temperature as the origin of this behavior.
Start page
2222
End page
2224
Volume
57
Issue
21
Language
English
OCDE Knowledge area
Física de partículas, Campos de la Física
Scopus EID
2-s2.0-0344002838
Source
Applied Physics Letters
ISSN of the container
00036951
Sources of information: Directorio de Producción Científica Scopus