Title
Morphologic evaluation of thin films by algorithms of optical phase stepping applied to images obtained by interferential microscopy
Date Issued
01 December 2013
Access level
metadata only access
Resource Type
conference paper
Abstract
The characterization of the superficial topography of a thin film, obtained from an interferometer installed in our Optics Laboratory, is done using bi-dimensional images of its surface overlaid with interference fringes (interferogram1). These images differ among them only by a constant variation of the optical phase2. The total number of images to acquire depends on the image processing algorithm to apply; this algorithm allows to determine the value of the phase introduced by the surface form. © 2013 SPIE.
Volume
8785
Language
English
OCDE Knowledge area
Óptica
Subjects
Scopus EID
2-s2.0-84891326911
Resource of which it is part
Proceedings of SPIE - The International Society for Optical Engineering
ISSN of the container
0277786X
ISBN of the container
978-081949601-0
Conference
8th Iberoamerican Optics Meeting, RIAO 2013 and 11th Latin American Meeting on Optics, Lasers, and Applications, OPTILAS 2013
Sources of information:
Directorio de Producción Científica
Scopus