Mo-Ti oxide films with compositions ranging from MoO3 to TiO2 were prepared by reactive DC magnetron sputtering using a newly developed high-rate technique with interacting plasma zones. Optical and electrochemical measurements showed that an increase of the Ti content yielded increased electrochemical stability, decreased coloration efficiency, and increased potential for electrochromic coloration. The films have interesting properties for color-neutral electrochromic devices. © 1995 IfI - Institute for Ionics.