Title
Effect of deposition methods on the properties of photocatalytic TiO <inf>2</inf> thin films prepared by spray pyrolysis and magnetron sputtering
Date Issued
09 June 2004
Access level
metadata only access
Resource Type
journal article
Publisher(s)
Institute of Physics Publishing
Abstract
Titanium dioxide thin films were deposited by DC reactive magnetron sputtering and spray pyrolysis methods onto glass and glass coated with fluorine doped tin oxide (FTO). The films were characterized by x-ray diffraction, scanning electron microscopy, atomic force microscopy and UV-visible spectroscopy. For films deposited by the sputtering technique we have studied the effect of the total pressure of an Ar-O2 mixture on the substrate properties, on the deposition rate, phase composition, crystallinity, surface morphology and on the photocatalytic properties. Also transparent TiO 2 thin films have been prepared by spray pyrolysis using a low concentration of titanium precursor with different substrate temperatures. At higher substrate temperatures the films were polycrystalline in the anatase phase; at lower substrate temperatures the films presented an amorphous configuration. The photocatalytic properties of TiO2 thin films were tested with the degradation methylene blue under UV light irradiation. The higher degradation rates were reached for films prepared by spray pyrolysis with a substrate temperature close to 400°C, and for a high total pressure (16 mTorr) for films deposited by DC magnetron sputtering.
Volume
16
Issue
22 SPEC. ISS.
Language
English
OCDE Knowledge area
Física de partículas, Campos de la Física
Scopus EID
2-s2.0-2942711609
Source
Journal of Physics Condensed Matter
ISSN of the container
09538984
Sources of information: Directorio de Producción Científica Scopus