Title
Production and characterization of Tm3+/Yb3+ codoped pedestal-type PbO-GeO2 waveguides1
Date Issued
01 January 2014
Access level
metadata only access
Resource Type
conference paper
Author(s)
Universidad de São Paulo
Universidad de São Paulo
Publisher(s)
National Research Council of Canada
Abstract
This work explores the production and characterization of pedestal-type active waveguides based on PbO-GeO2 (PGO) thin films codoped with Tm3+/Yb3+ rare earth ions. Silicon wafers containing around 1.7 μm of SiO2 thickness were used as substrate, and the pedestal structure was obtained by conventional photolithography and plasma etching in a reactive ion etching reactor. Plasma etching procedures were made in steps to reduce roughness at the laterals and sidewalls of waveguides. Around 0.5 μm of Tm3+/Yb3+ codoped PGO thin film was obtained by radio frequency magnetron sputtering deposition after etching procedures. Results of scanning electron microscopy confirmed the waveguide pedestal profile. Optical propagation losses around 4, 5, and 20 dB/cm were observed at 1050, 633, and 543 nm, respectively, for waveguide width in the 30-100 μm range. Near field profiles at these wavelengths and also at 980 nm are also reported and confirmed the multimode coupling behavior. The present results corroborate the possibility of using Tm3+/Yb3+ codoped PGO thin films as active waveguides for photonic applications. © 2013 Published by NRC Research Press.
Start page
597
End page
601
Volume
92
Issue
August 7
Language
English
OCDE Knowledge area
Ingeniería eléctrica, Ingeniería electrónica Ingeniería de materiales Física de plasmas y fluídos
Scopus EID
2-s2.0-84904310924
ISSN of the container
00084204
Conference
Canadian Journal of Physics
Sources of information: Directorio de Producción Científica Scopus