Title
Polymerie optical waveguides fabricated by plasma fluorination process
Date Issued
21 May 2008
Access level
metadata only access
Resource Type
conference paper
Author(s)
Universidad de São Paulo
Abstract
The fabrication and characterization of planar polymeric waveguides produced on silicon substrate for optical devices is reported. The cladding was made of a fluorinated polymer by CHF3 plasma polymerization and the core was a PMMA film prepared by spin coating. The polymeric waveguides with different widths (from 10 to 100 μm) were patterned by UV photolithography. The plasma fluorinated optical films were characterized by ellipsometry, metricon prism coupler, interferometer and FTIR-ATR. The waveguide optical characterization was done by coupling a laser beam, fibre-to-fibre coupling method, using a multimode optical fibre. © 2008 American Institute of Physics.
Start page
786
End page
790
Volume
992
Language
English
OCDE Knowledge area
Óptica
Ciencia de los polímeros
Física de plasmas y fluídos
Subjects
Scopus EID
2-s2.0-43649086370
ISSN of the container
15517616
ISBN of the container
978-073540511-0
Conference
AIP Conference Proceedings - 6th Ibero-American Conference onOptics and 9th Latin-American Meeting on Optics, Lasers and Applications, RIAO/OPTILAS 2007
Sources of information:
Directorio de Producción Científica
Scopus