Title
Platelet inversion domains induced by Mg-doping in ELOG AlGaN films
Date Issued
01 January 2003
Access level
metadata only access
Resource Type
conference paper
Author(s)
Publisher(s)
Materials Research Society
Abstract
We have studied the microstructure of heavily Mg-doped Al 0.03Ga0.97N films grown by metal-organic vapor phase epitaxy in the lateral overgrowth mode (ELOG). A new type of defects with a platelet shape has been observed. According to TEM analysis, these defects are embedded in the overgrowth regions. The platelet is normal to the ELOG stripe direction [1100]AlGaN, forming trapezoidal trenches on the film surface. The thickness of the platelet is about 100nm. We have identified these defects as inversion domains using convergent beam electron diffraction and HR-TEM. Mg segregation at the coalescence boundaries between ELOG islands is believed to result in the formation of the defects.
Start page
765
End page
770
Volume
798
Language
English
OCDE Knowledge area
Química física
Scopus EID
2-s2.0-2942672553
ISSN of the container
02729172
Conference
Materials Research Society Symposium - Proceedings
Sources of information:
Directorio de Producción Científica
Scopus