Title
GaN Vertical-Channel Junction Field-Effect Transistors with Regrown p-GaN by MOCVD
Date Issued
01 October 2020
Access level
open access
Resource Type
journal article
Author(s)
Yang C.
Fu H.
Kumar V.N.
Fu K.
Liu H.
Huang X.
Yang T.H.
Chen H.
Zhou J.
Deng X.
Montes J.
Vasileska D.
Zhao Y.
Publisher(s)
Institute of Electrical and Electronics Engineers Inc.
Abstract
We report an experimental demonstration of GaN-based vertical-channel junction field-effect transistors (VC-JFETs). A p-GaN regrowth by metalorganic chemical vapor deposition (MOCVD) and a subsequent self-planarization process were developed to fabricate the GaN VC-JFETs. Fin-like channel regions were patterned by electron beam lithography (EBL) and aligned to {m} -plane or {a} -plane. The electrical properties of lateral and vertical p-n junctions were characterized to verify the effectiveness of the p-GaN regrowth. Both VC-JFETs with {m} -plane and {a} -plane channels show decent gate modulation. We further discussed important factors that may affect the device performance including interfacial impurities and nonuniform acceptor distribution. This work highlights the successful demonstration of GaN VC-JFETs and lateral p-n junctions by an etch-then-regrow process, providing valuable information and reference for the further development of GaN power electronics.
Start page
3972
End page
3977
Volume
67
Issue
10
Language
English
OCDE Knowledge area
Química física
Scopus EID
2-s2.0-85092100354
Source
IEEE Transactions on Electron Devices
ISSN of the container
00189383
Sponsor(s)
Manuscript received March 6, 2020; revised April 21, 2020, May 27, 2020, and July 14, 2020; accepted July 15, 2020. Date of publication August 5, 2020; date of current version September 22, 2020. This work was supported in part by the ARPA-E PNDIODES Program monitored by Dr. Isik Kizilyalli under Grant DE-AR0000868, in part by the NASA HOT-Tech Program under Grant 80NSSC17K0768, and in part by NanoFab through the NSF under Contract ECCS-1542160. The review of this article was arranged by Editor Y. Cao. (Corresponding author: Yuji Zhao.) Chen Yang, Houqiang Fu, Viswanathan Naveen Kumar, Kai Fu, Xuanqi Huang, Tsung-Han Yang, Hong Chen, Jingan Zhou, Xuguang Deng, Jossue Montes, Dragica Vasileska, and Yuji Zhao are with the School of Electrical, Computer, and Energy Engineering, Arizona State University, Tempe, AZ 85287 USA (e-mail: cyang130@asu.edu; yuji.zhao@asu.edu).
Sources of information: Directorio de Producción Científica Scopus