Title
Development of the phase composition and the properties of Ti2AlC and Ti3AlC2 MAX-phase thin films – A multilayer approach towards high phase purity
Date Issued
30 January 2021
Access level
metadata only access
Resource Type
journal article
Author(s)
Torres C.
Calderón N.Z.
Eggert L.
Hopfeld M.
Rojas C.
Bund A.
Schaaf P.
Publisher(s)
Elsevier B.V.
Abstract
MAX phase thin films have been synthesized by thermal treatment of a Ti-Al-C multilayer system. The preparation of the multilayer system was carried out via magnetron sputtering. Based on the thickness ratio among the individual nanoscale monolayers (Ti, Al, C), the resulting MAX phase stoichiometry can be controlled. This paper describes the synthesis of both Ti2AlC and Ti3AlC2 MAX phases from the same precursor multilayer system which is composed of a sequence of Ti/Al/C pure elemental single layers with thicknesses of 14, 6, and 3.5 nm, respectively. This sequence is repeated 22 times with a total thickness of around 500 nm. Rapid thermal treatment tests were performed to study the phase development. The Ti2AlC MAX phase forms in a temperature range below 850 °C, whereas the Ti3AlC2 MAX phase starts to form at temperatures above 850 °C and reaches its highest phase purity at 950 °C. The thin film structures were studied by X-ray diffraction and Raman spectroscopy. Furthermore, the electrical and mechanical properties were investigated to gain more insights regarding the phase transformation and their influence on the thin film properties.
Volume
537
Language
English
OCDE Knowledge area
Ingeniería de materiales
Nano-tecnología
Subjects
Scopus EID
2-s2.0-85091122728
Source
Applied Surface Science
ISSN of the container
01694332
Sponsor(s)
Partial funding of the Deutsche Forschungsgemeinschaft (DFG grant Scha 632/27 ) is acknowledged.
This work was financially supported by the DAAD-CONCYTEC research initiative with the project number 137-2018-FONDECYT . Furthermore, parts of this research were funded by an internal grant of the Pontificia Universidad Católica del Perú (PUCP) with the grant number CAP 739 . CT is funded by the doctoral scholarship “Huiracocha” of PUCP with the rectoral resolution number 338/2018. RQ and NZC are funded by the doctoral grant provided by CONCYTEC under the contract number 236-2015-FONDECYT.
This work was financially supported by the DAAD-CONCYTEC research initiative with the project number 137-2018-FONDECYT. Furthermore, parts of this research were funded by an internal grant of the Pontificia Universidad Cat?lica del Per? (PUCP) with the grant number CAP 739. CT is funded by the doctoral scholarship ?Huiracocha? of PUCP with the rectoral resolution number 338/2018. RQ and NZC are funded by the doctoral grant provided by CONCYTEC under the contract number 236-2015-FONDECYT. Partial funding of the Deutsche Forschungsgemeinschaft (DFG grant Scha 632/27) is acknowledged. The authors would like to thank Mr. Joachim D?ll, Dr. Henry Romanus, M. Sc. Hauke-Lars Honig and M. Sc. Theresa Scheler from the Center of Micro- and Nanotechnology at TU Ilmenau for their support with some experiments (sputtering, characterization analysis). The authors would like to express their gratitude to Dr. Gerd Teichert from the Testing Center for Thin Films and Materials Properties Ilmenau for the Glow discharge optical emission spectroscopy measurements. The authors also thank Dr. Francisco Rumiche, Director of the Center of Materials Characterization (CAM) at PUCP for the logistic facilities as well as Dr. J. Andr?s Guerra from PUCP for his input regarding adopted the interpretation of Raman spectra and Claudia Morales for her assistance in the design of the graphical abstract.
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