Title
Fabrication and characterization of pedestal optical waveguides using TeO2-WO3-Bi2O3 thin film as core layer
Date Issued
28 November 2014
Access level
metadata only access
Resource Type
journal article
Author(s)
Universidad de São Paulo
Publisher(s)
Elsevier B.V.
Abstract
We present the production and characterization of pedestal type optical waveguides with TeO2-WO3-Bi2O3 thin films to be used as core layer for applications in optical devices such as the Mach-Zehnder Interferometer (MZI). The optical waveguides and MZI structure were fabricated from pedestal type obtained using conventional optical lithography procedures, followed by plasma etching and Magnetron Sputtering deposition. Optical measurements were performed to characterize the waveguides and MZI. Propagation losses around 2.0 dB/cm and 2.5 dB/cm were obtained at 633 and 1050 nm respectively. Single-mode propagation at 633 nm wavelength was observed for waveguide width up to 5 μm; larger waveguide width provided multi-mode propagation. Also, preliminary characterizations of the pedestal MZI structure presented multi-mode propagation for waveguide width of 30 μm.
Start page
225
End page
229
Volume
571
Issue
P1
Language
English
OCDE Knowledge area
Ingeniería de materiales
Óptica
Subjects
Scopus EID
2-s2.0-84919625680
Source
Thin Solid Films
ISSN of the container
00406090
Sponsor(s)
This work was financially supported by CNPq (Conselho Nacional de Desenvolvimento Científico e Tecnológico), the National Institute of Photonics (INCT Project — CNPq) and CAPES (Coordenação de Aperfeiçoamento Pessoal de Nível Superior). The authors also would like to acknowledge LPCM (Laboratório de Processamento e Caracterização de Materiais) from Fatec-SP for the SEM measurements, and A.R.P. dos Santos and T.F. Mori for the lithography and plasma etching procedures (Laboratório de Microeletrônica, LME, EPUSP).
Sources of information:
Directorio de Producción Científica
Scopus