Title
Electrical and Optical Characterization of p-Type Boron-Doped 6H-SiC Bulk Crystals
Date Issued
01 January 2003
Access level
metadata only access
Resource Type
conference paper
Author(s)
Bickermann M.
Herro Z.
Hofmann D.
Künecke U.
Wellmann P.J.
Winnacker A.
University of Erlangen-Nürnberg
Publisher(s)
Trans Tech Publications Ltd
Abstract
Electrical and optical characterization was performed to obtain information about the doping and compensation levels of samples cut from boron doped, physical vapor transport (PVT) grown 6H-SiC crystals. Values for N A and ND can be derived from analysis on temperature dependent Hall effect measurement data. The charge carrier concentration p at room temperature depends approximately linearly on NA/ND. The below band-gap absorption (BBGA) maximum at about 730 nm is correlated mainly to NA, and, for constant NA, is slightly anti-correlated to ND. The same results can be obtained from an √α vs. E plot extrapolated to α = 0 in the near band-gap region, as the broad absorption band induces a shift in the optically detected band-gap towards lower energies. Absorption measurements can give an estimation of NA-ND in boron doped SiC samples, and from wafers cut from the same crystal, the concentration of boron and compensating impurities can be evaluated.
Start page
337
End page
340
Volume
433-436
Language
English
OCDE Knowledge area
Ingeniería de materiales
Scopus EID
2-s2.0-0242581408
Source
Materials Science Forum
Resource of which it is part
Materials Science Forum
ISSN of the container
02555476
ISBN of the container
978-087849920-5
Conference
Proceedings of the 4th European Conference on Silicon Carbide and Related Materials
Sources of information: Directorio de Producción Científica Scopus