Title
Determination of charge carrier concentration in n- and p-doped SiC based on optical absorption measurements
Date Issued
07 January 2002
Access level
metadata only access
Resource Type
journal article
Author(s)
University of Erlangen
Abstract
We have investigated the effect of doping on absorption for various SiC polytypes, i.e., n-type (N) 6H-SiC, 4H-SiC, and 15R-SiC, p-type (Al) 6H-SiC, and 4H-SiC, and p-type (B) 6H-SiC. For these polytypes the band-gap narrowing with higher doping concentration is observed. In addition, for n-type doping below band-gap absorption bands at 464 nm for 4H-SiC, at 623 nm for 6H-SiC, and at 422 and 734 nm for 15R-SiC are observed. The peak intensities of these absorption bands show a linear relation to the charge carrier concentration obtained from Hall measurements. The corresponding calibration factors are given. As an application a purely optical wafer mapping of the spatial variation of the charge carrier concentration is demonstrated. © 2002 American Institute of Physics.
Start page
70
End page
72
Volume
80
Issue
1
Language
English
OCDE Knowledge area
Física de partículas, Campos de la Física
Subjects
Scopus EID
2-s2.0-79956054175
Source
Applied Physics Letters
ISSN of the container
00036951
Sources of information:
Directorio de Producción Científica
Scopus