Title
Pedestal height influence on AlN pedestal-type optical waveguides
Date Issued
22 December 2014
Access level
metadata only access
Resource Type
conference paper
Author(s)
Universidad de São Paulo
Universidad de São Paulo
Publisher(s)
Institute of Electrical and Electronics Engineers Inc.
Abstract
In this work, Aluminum Nitride (AIN) pedestal-type optical waveguides were fabricated and characterized. For the fabrication of these devices, a 0.6 μm-thick AIN film and a 1.5 μm-thick thermally grown silicon dioxide (SiO2) film were used as core and cladding layer, respectively. AlN films were deposited by RF reactive magnetron sputtering using parameter conditions studied previously. The pedestal profile was defined using conventional photolithography, followed by plasma etching of the cladding layer. The pedestal height was varied in 0.6, 1 and 1.2 μm. Optical losses characterization were measured in these devices using the top-view technique at a wavelength of 633 nm for all three pedestal heights and with widths varying from 1 to 100 μm.
Language
English
OCDE Knowledge area
Óptica Ingeniería de materiales
Scopus EID
2-s2.0-84921627779
ISBN of the container
978-147996835-0
Conference
2014 IEEE 9th IberoAmerican Congress on Sensors, IBERSENSOR 2014 - Conference Proceedings
Sources of information: Directorio de Producción Científica Scopus