This work reports the preparation of planar waveguides by Ag+ → Na+ ion exchange in Er3+-doped tellurite glass with a composition of 75TeO2-2GeO2-10Na2O-12ZnO-1Er2O3 (mol%). The metric, of Tx - Tg, indicates that the glass has good thermal stability. Measurments of refractive index, absorption spectrum, luminescence and lifetime were made. The glass was chemically stable during the ion exchange process. Monomode and multimode planar waveguides in the tellurite glasses have been prepared. We determined the depth of the guides, effective diffusion coefficient and the activation energy. The depths of the waveguides could be controlled by varying ion exchange temperatures and times (250-280 °C, and 3-12 h were used). © 2006 Elsevier B.V. All rights reserved.