Title
Distinct magnesium incorporation behavior in laterally grown AlGaN
Date Issued
01 January 2002
Access level
metadata only access
Resource Type
conference paper
Author(s)
Liu R.
Bell A.
Cherns D.
Amano H.
Akasaki I.
Publisher(s)
Materials Research Society
Abstract
Different magnesium incorporation behavior has been observed in heavily Mg-doped AlGaN epitaxial layers. The films were grown by metal-organic vapor phase epitaxy involving a lateral overgrowth technique on patterned sapphire substrates. TEM observations show that direct growth on sapphire exhibits pyramidal defects, while lateral overgrowth is homogeneous and free of structural defects. The orientation of the growth front significantly influences the microstructure, and the {0001} growth facet appears to be essential for the formation of the pyramidal defects. In addition, cylindrical and funnel-shaped nanopipes have been observed at dislocations with an edge component. The relationship between Mg segregation and these defects is discussed, and formation mechanisms are proposed taking into consideration the orientation of the growth front.
Start page
27
End page
34
Volume
743
Language
English
OCDE Knowledge area
Química física
Scopus EID
2-s2.0-0037696817
ISSN of the container
02729172
Conference
Materials Research Society Symposium - Proceedings
Sources of information: Directorio de Producción Científica Scopus