V2O5 films were prepared by reactive rf sputtering from a V cathode using an Ar/O2 plasma discharge. First, experiments were directed to determine the film structure using x-ray diffraction (XRD) and infrared spectroscopy. In the second part, photoelectron spectroscopy and UV-light excited PS were employed in order to detect structural differences between uncharged and Li charged V2O5 films. Finally, the preparation of microbatteries and their electrical performance were covered.