Title
Semiconductor gas sensors based on nanostructured tungsten oxide
Date Issued
16 July 2001
Access level
metadata only access
Resource Type
conference paper
Author(s)
Uppsala University
Abstract
Semiconductor gas sensors based on nanocrystallline WO3 films were produced by two different methods. Advanced reactive gas evaporation was used in both cases either for a direct deposition of films (deposited films) or to produce ultra fine WO3 powder which was used for screen printing of thick films. The deposited films sintered at 480°C and the screen-printed films sintered at 500°C displayed a mixture of monoclinic and tetragonal phases and had a mean grain size of approximately 10 and 45 nm, respectively. We studied the influence of the sintering temperature Ts of the films on their gas sensitivity. Unique and excellent sensing properties were found upon exposure to low concentrations of H2S in air at room temperature for both deposited and screen-printed films sintered at Ts = 480°C and at Ts = 500°C, respectively. © 2001 Elsevier Science B.V.
Start page
255
End page
260
Volume
391
Issue
2
Language
English
OCDE Knowledge area
Química analítica
Nano-procesos
Subjects
Scopus EID
2-s2.0-0035898926
ISSN of the container
00406090
Conference
Thin Solid Films
Sponsor(s)
This work was supported by Swedish Foundation for Strategic Research through its program on Advanced Micro Engineering and the Academy of Finland (projects #37778 and #44588).
Sources of information:
Directorio de Producción Científica
Scopus