Title
Origin of preferential grain orientation in excimer laser-induced crystallization of silicon thin films
Date Issued
16 April 2012
Access level
metadata only access
Resource Type
journal article
Author(s)
Institute Silicon Photovotaics
Abstract
The origin of the formation of {100} and {111} grain textures in polycrystalline silicon thin films prepared with multiple excimer laser shots at the super-lateral-growth crystallization regime is investigated in this study. Our results demonstrate that the type of texture formed is determined solely by the thickness of the silicon layer. At a critical value of 40 nm, a transition from {100} to {111} texture is observed with increasing layer thickness. It is therefore proposed that below this critical value, the texture formation is governed by surface energy anisotropy whereas above it, the kinetics of the solidification process predominate. © 2012 American Institute of Physics.
Volume
100
Issue
16
Language
English
OCDE Knowledge area
Física y Astronomía
Scopus EID
2-s2.0-84859980702
Source
Applied Physics Letters
ISSN of the container
00036951
Sources of information:
Directorio de Producción Científica
Scopus