Title
PROPERTIES OF THE INTERFACE BETWEEN AMORPHOUS SILICON AND NITRIDE.
Date Issued
01 January 1986
Access level
metadata only access
Resource Type
conference paper
Author(s)
Publisher(s)
Materials Research Soc
Abstract
The structural, compositional and electronic properties of the a-Si:H/a-SiN//x:H interface are reported. High resolution TEM and light/dark ESR studies conclude that the interface has a finite width of the order of 10 Angstrom. In addition, there is a high density of charges residing near the interface. Band bendings occur in both a-Si:H and a-SiN//x:H, resulting in few neutral dangling bonds in the a-Si:H/a-SiN//x:H multilayer structure. The depletion width in the nitride is of the order of 100 Angstrom. The slow decay of the LESR in multilayers with thin sublayers is attributed to charges trapped in the slow states in the nitride.
Start page
351
End page
359
Volume
70
Language
English
OCDE Knowledge area
Ingeniería de materiales
Scopus EID
2-s2.0-0023027794
ISBN
9780931837364
ISSN of the container
02729172
ISBN of the container
0931837367
Conference
Materials Research Society Symposia Proceedings
Sources of information:
Directorio de Producción Científica
Scopus