Title
Deposition of thin films using argon/acetylene atmospheric pressure plasma jet
Date Issued
25 February 2017
Access level
open access
Resource Type
journal article
Author(s)
Kodaira F.
Prysiazhnyi V.
Mota R.
Kostov K.
Sao Paulo State University
Publisher(s)
Elsevier B.V.
Abstract
Atmospheric pressure plasma jet was used to deposit polymer films from argon/air/acetylene mixture. Depending on the gas composition, three modes of operation were observed and characterized. The film deposited by a stationary jet had a circular shape with area (where thickness was almost constant) about the nozzle inner diameter. The deposition rate of stationary jet decreased with the time: a film of 2 μm was obtained after the first two minutes, while in the next two minutes only 1.3 μm film was deposited. The plasma polymers were characterized by infrared spectroscopy, where variety of C–H and few C–O bonds were detected. By using a linear displacement system, we obtained homogeneous deposition over a larger area with deposition rate of about 330 nm/min, showing the potential of such plasma jet system for large-scale depositions.
Start page
13
End page
18
Volume
312
Language
English
OCDE Knowledge area
Ingeniería, Tecnología
Scopus EID
2-s2.0-84995654379
Source
Surface and Coatings Technology
ISSN of the container
02578972
Sponsor(s)
Funding text This research was financed by Fundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP, 2013/06732-3) and Conselho nacional de desenvolvimento científico e tecnológico (CNPq, 470995/2013-0).
Sources of information: Directorio de Producción Científica Scopus