Title
Strain management of AlGaN-based distributed Bragg reflectors with GaN interlayer grown by metalorganic chemical vapor deposition
Date Issued
22 August 2016
Access level
open access
Resource Type
journal article
Author(s)
Liu Y.S.
Wang S.
Xie H.
Kao T.T.
Mehta K.
Jia X.J.
Shen S.C.
Yoder P.D.
Detchprohm T.
Dupuis R.D.
Publisher(s)
American Institute of Physics Inc
Abstract
We report the crack-free growth of a 45-pair Al0.30Ga0.70N/Al0.04Ga0.96N distributed Bragg reflector (DBR) on 2 in. diameter AlN/sapphire template by metalorganic chemical vapor deposition. To mitigate the cracking issue originating from the tensile strain of Al0.30Ga0.70N on GaN, an AlN template was employed in this work. On the other hand, strong compressive strain experienced by Al0.04Ga0.96N favors 3D island growth, which is undesired. We found that inserting an 11 nm thick GaN interlayer upon the completion of AlN template layer properly managed the strain such that the Al0.30Ga0.70N/Al0.04Ga0.96N DBR was able to be grown with an atomically smooth surface morphology. Smooth surfaces and sharp interfaces were observed throughout the structure using high-angle annular dark-field imaging in the STEM. The 45-pair AlGaN-based DBR provided a peak reflectivity of 95.4% at λ = 368 nm with a bandwidth of 15 nm.
Volume
109
Issue
8
Language
English
OCDE Knowledge area
Química física
Scopus EID
2-s2.0-84984680220
Source
Applied Physics Letters
ISSN of the container
00036951
Sponsor(s)
This work was supported by the Defense Advanced Research Projects Agency under Contract No. W911NF-15-1-0026. This work was performed in part at the Georgia Tech Institute for Electronics and Nanotechnology, a member of the National Nanotechnology Coordinated Infrastructure, which is supported by the National Science Foundation (Grant ECCS-1542174). RDD acknowledges additional support of the Steve W. Chaddick Endowed Chair in Electro-Optics and the Georgia Research Alliance.
Sources of information: Directorio de Producción Científica Scopus