cris.boxmetadata.label.title
Imaging of the silicon on sapphire interface by high-resolution transmission electron microscopy
cris.boxmetadata.label.dateissued
01 browse.startsWith.months.december 1981
cris.boxmetadata.label.accesslevel
metadata only access
cris.boxmetadata.label.resourcetype
journal article
cris.boxmetadata.label.authors
Aranovich J.
cris.boxmetadata.label.abstract
The silicon-sapphire interface of CVD silicon on a (11̄02) sapphire substrate has been studied by high-resolution transmission electron microscopy. Cross-section images of the interface are presented where the silicon and sapphire lattices are directly resolved. The images show that the interface is planar and abrupt to the limit of resolution (less than 3 Å). Defect anisotropy is evident and can be linked to tilt of the [100] direction of the silicon layer with respect to the normal to the substrate.
cris.boxmetadata.label.citationstartpage
439
cris.boxmetadata.label.citationendpage
441
cris.boxmetadata.label.volume
38
cris.boxmetadata.label.issue
6
cris.boxmetadata.label.language
English
cris.boxmetadata.label.ocdeknowledgeArea
Física de partículas, Campos de la Física
cris.boxmetadata.label.doi
cris.boxmetadata.label.scopusidentifier
2-s2.0-0342912403
cris.boxmetadata.label.source
Applied Physics Letters
cris.boxmetadata.label.containerissn
00036951
peru-layout.shadow-copies
Directorio de Producción Científica
Scopus